Vaccum Valve

CIRCULAR_GATE1.jpg

  1. Circular Gate Valve 

당사 Circular Type Gate Valve는 고진공펌프(Turbo, Cryo, Diffusion Pump)에 주로 많이 사용되는 제품으로, 역압에 잘 견디는 제품입니다. 
동작원리는 Two Stage 방법으로 First stage 로 Air cylinder가 밸브 내부에 있는 plate를 Sealing 부분까지 이동 시킨 후 Second Stage 로 Plate가 비스듬이 올라가 sealing 시켜주는 밸브 입니다. 
Pneumatic Type 은 Air로 Close(0%) 또는 Open(100%) 시키며, Manual Type 은 손으로 밸브를 동작 시켜 Close/Open 동작을 시킬 수 있습니다.
 
​Acting
Double acting
Double acting
Pneumatic & Manual
  1.  외형도는 Material 사양과 관계없이 동일합니다.
           ​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​​                                                                       ​​    


GENIUS_Vacuum_Valve-02_Circular_Gate_Valve.jpg

  1.  Specifications

 Valve OperatedAdaptive, auto Tuning(Learn), PID, Position
 Speed(Open/Close)Less than 1.0 sec
 Resolution 1/18,000
 Controller Repeatability ± 0.1% of F.S
 Drive Method Direct Gear
 Ambient Operating Temperature 15℃ ~ 60℃ 
 Input Power Required +24VDC @ 3A
 Output Power +24V or  ±15V(Optional)
 Input Power 0 to 10VDC linear with pressure 1ea
 4 to 20mA (Option)
 Output Signal(Option) 0 to 10VDC for 0 to 100% valve position
 0 to VDC for 1 to 100% F.S Pressure
​Leak rateSide to Side7.5 x 10^-10 Torr.cc/sec
External 7.5 x 10^-11 Torr.cc/sec
Pressure Range1.0 x 10^-9 Torr to 1.6 Torr(DN63~200)
1.0 x 10^-9 Torr to 1.2 Torr(DN250~320)
Differential Pressure Range at Open≤ 30mbar (22Torr)

​BodySUS304

Locking ModuleSUS304

BonnetVitron/MEtal
MaterialValve SeatViton(Optional Kalrez)

BellowAM350
Actuation SealWelded bellows or O-ring seal
Pneumatic cylinder Pressure70  to 100psig(High size 8"~12" port : 80 to 100psig)
Differential Pressure on the gateLess than 1.4bar in ether direction
TemperatureBody​Less than 150℃
Gate​Less than 150℃
Cycle until
First service		Standard100,000cycles
Optional1,000,000cycles
Mounting PositionAny
ActuatorPneumaticPosition Indicators: 20mA AC11/220V or 40mA DC24V
ManualHand wheel type

  1. Order Information 
     
​Flangecode​Size(ID)Actuator
NW
ISO
JIS
CF
NW
ISO
JIS
CF
25 to 630P(Pneumatic)
M(Manual)